Cassette-less cleaning machine×ゼビオス（XEVIOS CORP.,） - メーカー・企業と製品の一覧

300mm Cassette-less Cleaning System

Used in the chemical polishing process after final polishing / Batch processing of 50 pieces / Achieving high purity of 19nμm/5 pieces

<Equipment Overview> This device is used in the chemical polishing process after final polishing. Its feature is that it places 25 wafers in the gaps of 25 wafers, creating a half pitch, allowing for the simultaneous processing of 50 wafers. It achieves a high purity of 19nμm / 5 pieces.

• 企業：ゼビオス（XEVIOS CORP.,）
• 価格：Other

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• Other semiconductor manufacturing equipment
• Other cleaning machines